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Semiconductor Material Thermal System
Provides thermal zones, vacuum control, and traceable process records for semiconductor material parts.
- Code
- QJ-SMT-1600
This thermal system focuses on heat treatment and process validation for material parts, with attention to stable zones, clean assembly, vacuum control, and traceable delivery documents.
Specifications
- Operating temperature
- 1600 C
- Cleanliness
- Confirmed per project
- Vacuum control
- Multi-stage pumping with monitoring ports
- Traceability
- Configuration, process, and acceptance records
Applications
- Materials
- Semiconductor material parts, quartz parts, and ceramic parts
- Scenarios
- Part heat treatment, stress relief, and process-window validation
- Documents
- Configuration list, process records, and acceptance points